IsoChuck

American Probe & Technologies, Inc.
471 Montague Expressway,
Milpitas, CA 95035-6800
United States of America
Tel: 408 263-3356
Fax: 408 263-3797

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IsoChuck

High Performance Chuck for Your Needs.

In the probing industry, the demand for improved test performance is critical. The IsoChuck solution can upgrade your existing probe system with an advanced design with lower capacitance, low current leakage, and provide an excellent solution for high voltage test environments. The power of the IsoChuck design is in its nonconductive, lightweight material. The applied metallization to this fixture in specific areas supplies surface connection and isolated shielding components resulting in advanced performance for the probing industry.

The wafer chuck capacitance in the 4", 6" and 8" test environments was a controllable factor. With the current advancements in the 300mm wafers, this is no longer a minor factor to overcome. The low density material of the IsoChuck design, compared to its 300mm metal counterparts, provides advantages in mechanical repeatability due to the lower mass. The low dielectric constant provides very low chuck capacitance in the triaxial versions of less than 200pF, and less than 10pF with a driven guard!

300 mm IsoChuck designed for Suss Microtec Prober. Coax design with less than 120 pF of passive capacitance.	Coaxial Version The newly announced IsoChuck series was designed to improve the test performance required from the semiconductor industry. With the wafer sizes growing to over 300mm, the capacitance of conventional wafer chucks has also grown. This increase in capacitance causes problems in several aspects of wafer probing. The IsoChuck was designed to reduce the weight and mass of the wafer chuck, as well as improve test performance as noted in the following documentation. Review for yourself the clear difference the IsoChuck can provide in DC parametric, Kelvin contacts, and high voltage breakdown strength.

ISO-CHUCK for Electroglas 2001 with dual BNC connectors.	Kelvin Version One of the many materials that APT has chosen for the IsoChuck design is Ultem. This material has solid mechanical & light weight properties, with excellent electrical properties, and a dielectric constant of 3.15 with a volume resistivity of 1.0x1017.

APT offers a complete line of low current probes and test accessories to provide a turnkey system solution for your analytical test requirements. IsoChuck is a trade name and is a patented design protected by US patent #6,236,221,B1.	Triax Version Configurations & Materials • Ultem 1000 is one of several materials available for the IsoChuck Series of wafer chucks. Contact American Probe & Technologies for details on the material and configuration which will result in superior electrical or mechanical properties for your custom application. • American Probe & Technologies has built its success on high quality products tested at our facility to meet or exceed the specifications requested. APT has a complete test and measurement laboratory and can provide a certificate of compliance.

IsoChuck Specifications (pdf) IsoChuck Project (pdf)

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One of the many materials that APT has chosen for the IsoChuck design is Ultem. This material has solid mechanical & light weight properties, with excellent electrical properties, and a dielectric constant of 3.15 with a volume resistivity of 1.0x1017.