American Probe & Technologies, Inc.
471 Montague Expressway, Milpitas, California 95035-6800 United States of America Tel: 408 263-3356
Fax: 408 263-3797 |
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IsoChuck
High Performance Chuck for your needs
In the probing industry, the demand for
improved test performance is critical. The ISO-CHUCK solution can upgrade your
existing probe system with an advanced design with lower capacitance, low
current leakage, and provide an excellent solution for high voltage test
environments. The power of the ISO-CHUCK design is in its nonconductive,
lightweight material. The applied metallization to this fixture in specific
areas supplies surface connection and isolated shielding components resulting in
advanced performance for the probing industry. |
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| The wafer chuck
capacitance in the 4", 6" and 8" test environments was a controllable factor.
With the current advancements in the 300mm wafers, this is no longer a minor
factor to overcome. The low density material of the ISO-CHUCK design, compared
to its 300mm metal counterparts, provides advantages in mechanical repeatability
due to the lower mass. The low dielectric constant provides very low chuck
capacitance in the Triaxial versions of less than 200pF, and less than 10pF with
a driven guard! |
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Coaxial Version
The newly announced ISO-CHUCK series was designed to improve the test performance required from the semiconductor industry. With the wafer sizes growing to over 300mm, the
capacitance of conventional wafer chucks has also grown. This increase in
capacitance causes problems in several aspects of wafer probing. The ISO-CHUCK was designed to reduce the weight and mass of the wafer chuck, as well as improve test performance as noted in the following documentation. Review for yourself the clear difference the ISO-CHUCK can provide in DC parametric, Kelvin contacts, and high voltage breakdown
strength.
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ISO-CHUCK for Electroglas 2001 with dual BNC connectors |
Kelvin Version
One
of the many materials that APT has chosen for the ISO-CHUCK design is Ultem.
This material has solid mechanical & light weight properties, with excellent
electrical properties, and a dielectric constant of 3.15 with a volume
resistivity of 1.0x1017.
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• APT offers a complete line of low current probes and test
accessories to provide a turnkey system solution for your analytical test
requirements.
ISO-CHUCK is a trade name and is a
patented design protected by US patent # 6,236,221,B1
| Triax Version
Configurations & Materials
• Ultem 1000 is one of several materials available for the ISO-CHUCK
series of wafer chucks. Contact American
Probe & Technologies for details on the material and configuration which will
result in superior electrical or mechanical properties for your custom
application.
• American Probe & Technologies has built its success on products that
are high quality, and tested at our facility to meet or exceed the
specifications requested. APT has a complete test and measurement laboratory and
can provide a certificate of compliance.
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