300 mm IsoChuck designed for Suss Microtec Prober.
Coax design with less than 120 pF of passive capacitance.
The newly announced IsoChuck series was designed to improve the test performance required from the semiconductor industry. With the wafer sizes growing to over 300mm, the capacitance of conventional wafer chucks has also grown. This increase in capacitance causes problems in several aspects of wafer probing. The IsoChuck was designed to reduce the weight and mass of the wafer chuck, as well as improve test performance as noted in the following documentation. Review for yourself the clear difference the IsoChuck can provide in DC parametric, Kelvin contacts, and high voltage breakdown strength.
*Models available for several auto and manual probers.