HC6000 Series Thermal Wafer Chucks
American Probe & Technologies has introduced the HC-6000 Series of thermal chucks to provide accurate thermal control and surface uniformity required by the Semiconductor Industry. With the heated chuck optimized for DC parametric or CV testing, APT has several configurations to meet your specific test applications.
True linear proportional.
DC heater output.
Wide temperature range (-65o to 400o C).
Excellent temperature uniformity (±0.3o C).
*Custom designs and options available.