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Thermal Wafer Chucks

Looking for a heated wafer chuck for your prober? Begin here with several standard and custom thermal wafer chucks for your existing or new analytical prober. Models also available for many series of Electroglas, TEL, KLA autoprobers.

Options
Temperature range:  -35 to 400 deg. C.
Electrical configuration: Standard, Coaxial, Triaxial, Kelvin, High Isolation Mounting Styles for most analytical prober and auto-probers.